한글카탈로그
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- 35~200mm의 롱 스트로크를 실현하여, 기존의 SGSP시리즈와 동일하게 콤팩트화를 실현했습니다.
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Model | VSGSP26-200(X) |
MAX Speed | 20mm/sec |
Positional Repeatability | 10μm |
Axes of Travel | X Axis |
Stage Material | Aluminium |
Censer type | GN-PT5M3B-1 (Metrol Co., Ltd.) |
Sensor Part Number | GN-PT5M3B-1 (Metrol Co., Ltd.) |
Stage Size | 80×80mm |
Resolution (Half) | 1μm/pulse |
Resolution (Full) | 4μm/pulse |
Limit Sensor | Vacuum touch sensor (NORMAL CLOSE) |
Lost Motion | 10μm |
Positioning Slide | Crossed roller |
Travel | 200mm |
Proximity Origin Sensor | None |
Origin Sensor | None |
Minimum Incremental Motion (refurence) | 0.2μm |
Weight | 2.5kg |
Feed Screw | Precision ground screw φ4mm, 0.5mm lead |
Load Capacity | 29.4N(3.0kgf) |
Finish | None |
Resolution (Full) | 0.5μm/pulse |
Resolution (Half) | 2μm/pulse |